Low-Loss Superconducting Resonators Fabricated from Tantalum Films Grown at Room Temperature
Fuente:
arXiv
Saved in:
| Main Authors: | , , , , , , , , , , , , , , , , , , |
|---|---|
| Format: | Preprint |
| Published: |
2025
|
| Subjects: | |
| Online Access: | |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| _version_ | 1866915448401952768 |
|---|---|
| author | Marcaud, Guillaume Perello, David Chen, Cliff Umbarkar, Esha Weiland, Conan Gao, Jiansong Diez, Sandra Ly, Victor Mahuli, Neha D'Souza, Nathan He, Yuan Aghaeimeibodi, Shahriar Resnick, Rachel Jaye, Cherno Rumaiz, Abdul K. Fischer, Daniel A. Hunt, Matthew Painter, Oskar Jarrige, Ignace |
| author_facet | Marcaud, Guillaume Perello, David Chen, Cliff Umbarkar, Esha Weiland, Conan Gao, Jiansong Diez, Sandra Ly, Victor Mahuli, Neha D'Souza, Nathan He, Yuan Aghaeimeibodi, Shahriar Resnick, Rachel Jaye, Cherno Rumaiz, Abdul K. Fischer, Daniel A. Hunt, Matthew Painter, Oskar Jarrige, Ignace |
| contents | The use of $α$-tantalum in superconducting circuits has enabled a considerable improvement of the coherence time of transmon qubits. The standard approach to grow $α$-tantalum thin films on silicon involves heating the substrate, which takes several hours per deposition and prevents the integration of this material with wafers containing temperature-sensitive components. We report a detailed experimental study of an alternative growth method of $α$-tantalum on silicon, which is achieved at room temperature through the use of a niobium seed layer. Despite a substantially higher density of oxygen-rich grain boundaries in the films sputtered at room temperature, resonators made from these films are found to have state-of-the-art quality factors, comparable to resonators fabricated from tantalum grown at high temperature. This finding challenges previous assumptions about correlations between material properties and microwave loss of superconducting thin films, and opens a new avenue for the integration of tantalum into fabrication flows with limited thermal budget. |
| format | Preprint |
| id |
arxiv_https___arxiv_org_abs_2501_09885 |
| institution | arXiv |
| publishDate | 2025 |
| record_format | arxiv |
| spellingShingle | Low-Loss Superconducting Resonators Fabricated from Tantalum Films Grown at Room Temperature Marcaud, Guillaume Perello, David Chen, Cliff Umbarkar, Esha Weiland, Conan Gao, Jiansong Diez, Sandra Ly, Victor Mahuli, Neha D'Souza, Nathan He, Yuan Aghaeimeibodi, Shahriar Resnick, Rachel Jaye, Cherno Rumaiz, Abdul K. Fischer, Daniel A. Hunt, Matthew Painter, Oskar Jarrige, Ignace Applied Physics Materials Science The use of $α$-tantalum in superconducting circuits has enabled a considerable improvement of the coherence time of transmon qubits. The standard approach to grow $α$-tantalum thin films on silicon involves heating the substrate, which takes several hours per deposition and prevents the integration of this material with wafers containing temperature-sensitive components. We report a detailed experimental study of an alternative growth method of $α$-tantalum on silicon, which is achieved at room temperature through the use of a niobium seed layer. Despite a substantially higher density of oxygen-rich grain boundaries in the films sputtered at room temperature, resonators made from these films are found to have state-of-the-art quality factors, comparable to resonators fabricated from tantalum grown at high temperature. This finding challenges previous assumptions about correlations between material properties and microwave loss of superconducting thin films, and opens a new avenue for the integration of tantalum into fabrication flows with limited thermal budget. |
| title | Low-Loss Superconducting Resonators Fabricated from Tantalum Films Grown at Room Temperature |
| topic | Applied Physics Materials Science |
| url | https://arxiv.org/abs/2501.09885 |