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Auteurs principaux: Marcaud, Guillaume, Perello, David, Chen, Cliff, Umbarkar, Esha, Weiland, Conan, Gao, Jiansong, Diez, Sandra, Ly, Victor, Mahuli, Neha, D'Souza, Nathan, He, Yuan, Aghaeimeibodi, Shahriar, Resnick, Rachel, Jaye, Cherno, Rumaiz, Abdul K., Fischer, Daniel A., Hunt, Matthew, Painter, Oskar, Jarrige, Ignace
Format: Preprint
Publié: 2025
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Accès en ligne:https://arxiv.org/abs/2501.09885
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author Marcaud, Guillaume
Perello, David
Chen, Cliff
Umbarkar, Esha
Weiland, Conan
Gao, Jiansong
Diez, Sandra
Ly, Victor
Mahuli, Neha
D'Souza, Nathan
He, Yuan
Aghaeimeibodi, Shahriar
Resnick, Rachel
Jaye, Cherno
Rumaiz, Abdul K.
Fischer, Daniel A.
Hunt, Matthew
Painter, Oskar
Jarrige, Ignace
author_facet Marcaud, Guillaume
Perello, David
Chen, Cliff
Umbarkar, Esha
Weiland, Conan
Gao, Jiansong
Diez, Sandra
Ly, Victor
Mahuli, Neha
D'Souza, Nathan
He, Yuan
Aghaeimeibodi, Shahriar
Resnick, Rachel
Jaye, Cherno
Rumaiz, Abdul K.
Fischer, Daniel A.
Hunt, Matthew
Painter, Oskar
Jarrige, Ignace
contents The use of $α$-tantalum in superconducting circuits has enabled a considerable improvement of the coherence time of transmon qubits. The standard approach to grow $α$-tantalum thin films on silicon involves heating the substrate, which takes several hours per deposition and prevents the integration of this material with wafers containing temperature-sensitive components. We report a detailed experimental study of an alternative growth method of $α$-tantalum on silicon, which is achieved at room temperature through the use of a niobium seed layer. Despite a substantially higher density of oxygen-rich grain boundaries in the films sputtered at room temperature, resonators made from these films are found to have state-of-the-art quality factors, comparable to resonators fabricated from tantalum grown at high temperature. This finding challenges previous assumptions about correlations between material properties and microwave loss of superconducting thin films, and opens a new avenue for the integration of tantalum into fabrication flows with limited thermal budget.
format Preprint
id arxiv_https___arxiv_org_abs_2501_09885
institution arXiv
publishDate 2025
record_format arxiv
spellingShingle Low-Loss Superconducting Resonators Fabricated from Tantalum Films Grown at Room Temperature
Marcaud, Guillaume
Perello, David
Chen, Cliff
Umbarkar, Esha
Weiland, Conan
Gao, Jiansong
Diez, Sandra
Ly, Victor
Mahuli, Neha
D'Souza, Nathan
He, Yuan
Aghaeimeibodi, Shahriar
Resnick, Rachel
Jaye, Cherno
Rumaiz, Abdul K.
Fischer, Daniel A.
Hunt, Matthew
Painter, Oskar
Jarrige, Ignace
Applied Physics
Materials Science
The use of $α$-tantalum in superconducting circuits has enabled a considerable improvement of the coherence time of transmon qubits. The standard approach to grow $α$-tantalum thin films on silicon involves heating the substrate, which takes several hours per deposition and prevents the integration of this material with wafers containing temperature-sensitive components. We report a detailed experimental study of an alternative growth method of $α$-tantalum on silicon, which is achieved at room temperature through the use of a niobium seed layer. Despite a substantially higher density of oxygen-rich grain boundaries in the films sputtered at room temperature, resonators made from these films are found to have state-of-the-art quality factors, comparable to resonators fabricated from tantalum grown at high temperature. This finding challenges previous assumptions about correlations between material properties and microwave loss of superconducting thin films, and opens a new avenue for the integration of tantalum into fabrication flows with limited thermal budget.
title Low-Loss Superconducting Resonators Fabricated from Tantalum Films Grown at Room Temperature
topic Applied Physics
Materials Science
url https://arxiv.org/abs/2501.09885