X-ray diffraction characterization of suspended structures for MEMS applications
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arXiv
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| Main Authors: | , , , , , , , , |
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| Format: | Preprint |
| Published: |
2025
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| _version_ | 1866912193090420736 |
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| author | Goudeau, P. Tamura, N. Lavelle, B. Rigo, S. Masri, T. Bosseboeuf, A. Sarnet, T. Petit, J. -A. Desmarres, J. -M. |
| author_facet | Goudeau, P. Tamura, N. Lavelle, B. Rigo, S. Masri, T. Bosseboeuf, A. Sarnet, T. Petit, J. -A. Desmarres, J. -M. |
| contents | Mechanical stress control is becoming one of the major challenges for the future of micro and nanotechnologies. Micro scanning X-ray diffraction is one of the promising techniques that allows stress characterization in such complex structures at sub micron scales. Two types of MEMS structure have been studied: a bilayer cantilever composed of a gold film deposited on poly-silicon and a boron doped silicon bridge. X-ray diffraction results are discussed in view of numerical simulation experiments. |
| format | Preprint |
| id |
arxiv_https___arxiv_org_abs_2501_10424 |
| institution | arXiv |
| publishDate | 2025 |
| record_format | arxiv |
| spellingShingle | X-ray diffraction characterization of suspended structures for MEMS applications Goudeau, P. Tamura, N. Lavelle, B. Rigo, S. Masri, T. Bosseboeuf, A. Sarnet, T. Petit, J. -A. Desmarres, J. -M. Materials Science Applied Physics Classical Physics Mechanical stress control is becoming one of the major challenges for the future of micro and nanotechnologies. Micro scanning X-ray diffraction is one of the promising techniques that allows stress characterization in such complex structures at sub micron scales. Two types of MEMS structure have been studied: a bilayer cantilever composed of a gold film deposited on poly-silicon and a boron doped silicon bridge. X-ray diffraction results are discussed in view of numerical simulation experiments. |
| title | X-ray diffraction characterization of suspended structures for MEMS applications |
| topic | Materials Science Applied Physics Classical Physics |
| url | https://arxiv.org/abs/2501.10424 |