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X-ray diffraction characterization of suspended structures for MEMS applications

Fuente: arXiv

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Bibliographic Details
Main Authors:	Goudeau, P., Tamura, N., Lavelle, B., Rigo, S., Masri, T., Bosseboeuf, A., Sarnet, T., Petit, J. -A., Desmarres, J. -M.
Format:	Preprint
Published:	2025
Subjects:	Materials Science Applied Physics Classical Physics
Online Access:	Acceder al recurso
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