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| Main Authors: | , , , , , , |
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| Format: | Preprint |
| Published: |
2025
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| Subjects: | |
| Online Access: | https://arxiv.org/abs/2501.11492 |
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| _version_ | 1866929683021430784 |
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| author | Lajaunie, L. David, M. L. Pailloux, F. Tromas, C. Simoen, E. Claeys, C. Barbot, J. F. |
| author_facet | Lajaunie, L. David, M. L. Pailloux, F. Tromas, C. Simoen, E. Claeys, C. Barbot, J. F. |
| contents | A thin cobalt layer is deposited by electron beam evaporation onto a germanium substrate after an in situ cleaning annealing at 400 or 700 C. The effect of these pretreatments on the Co/Ge Schottky barrier properties and on the germanide formation is investigated by using different techniques. A strong influence of the pre-treatment is observed. The pre-treatment at 700 C removes the native oxide but enhances the diffusion of contaminants. After post-metal deposition annealing, the sample pre-treated at 700 C shows a double layer structure due to interdiffusion, whereas some large isolated islands are present in the sample pre-treated at 400 C. |
| format | Preprint |
| id |
arxiv_https___arxiv_org_abs_2501_11492 |
| institution | arXiv |
| publishDate | 2025 |
| record_format | arxiv |
| spellingShingle | Influence of the pretreatment anneal on Co germanide Schottky contacts Lajaunie, L. David, M. L. Pailloux, F. Tromas, C. Simoen, E. Claeys, C. Barbot, J. F. Materials Science Applied Physics A thin cobalt layer is deposited by electron beam evaporation onto a germanium substrate after an in situ cleaning annealing at 400 or 700 C. The effect of these pretreatments on the Co/Ge Schottky barrier properties and on the germanide formation is investigated by using different techniques. A strong influence of the pre-treatment is observed. The pre-treatment at 700 C removes the native oxide but enhances the diffusion of contaminants. After post-metal deposition annealing, the sample pre-treated at 700 C shows a double layer structure due to interdiffusion, whereas some large isolated islands are present in the sample pre-treated at 400 C. |
| title | Influence of the pretreatment anneal on Co germanide Schottky contacts |
| topic | Materials Science Applied Physics |
| url | https://arxiv.org/abs/2501.11492 |