Magnetic Trampoline Resonators from (La,Sr)MnO3 Single-Crystal Thin Films

Fuente: arXiv
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Autores principales: Manca, Nicola, Mungpara, Dhavalkumar, Cichetto Jr., Leonélio, Plaza, Alejandro E., Lamura, Gianrico, Schwarz, Alexander, Marré, Daniele, Pellegrino, Luca
Formato: Preprint
Publicado: 2025
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author Manca, Nicola
Mungpara, Dhavalkumar
Cichetto Jr., Leonélio
Plaza, Alejandro E.
Lamura, Gianrico
Schwarz, Alexander
Marré, Daniele
Pellegrino, Luca
author_facet Manca, Nicola
Mungpara, Dhavalkumar
Cichetto Jr., Leonélio
Plaza, Alejandro E.
Lamura, Gianrico
Schwarz, Alexander
Marré, Daniele
Pellegrino, Luca
contents Micro-electro-mechanical resonators employing a magnetic element have been proposed for magnetic field sensing applications, but the integration of magnetic materials with standard semiconductor compounds is challenging and requires complex fabrication protocols. We present a different approach relying on (La0.7,Sr0.3)MnO3 (LSMO), an oxide compound that works both as structural element for the resonator and functional magnetic layer. Suspended trampolines are realized in a single step process from LSMO thin films and show quality factor up to 60k and fQ products reaching 10$^{10}$ Hz. Their magnetic properties are probed by a SQUID magnetometer and magnetic force microscopy, showing saturation magnetization of 240 kA/m at room temperature and in-plane magnetic domains with coercivity of 2.5 mT. Being entirely made from a magnetic material, these resonators exhibit a larger magnetic interaction volume compared to other solutions, making them ideal candidates as building blocks for high-sensitivity magnetic field sensors.
format Preprint
id arxiv_https___arxiv_org_abs_2501_12177
institution arXiv
publishDate 2025
record_format arxiv
spellingShingle Magnetic Trampoline Resonators from (La,Sr)MnO3 Single-Crystal Thin Films
Manca, Nicola
Mungpara, Dhavalkumar
Cichetto Jr., Leonélio
Plaza, Alejandro E.
Lamura, Gianrico
Schwarz, Alexander
Marré, Daniele
Pellegrino, Luca
Applied Physics
Materials Science
Strongly Correlated Electrons
Micro-electro-mechanical resonators employing a magnetic element have been proposed for magnetic field sensing applications, but the integration of magnetic materials with standard semiconductor compounds is challenging and requires complex fabrication protocols. We present a different approach relying on (La0.7,Sr0.3)MnO3 (LSMO), an oxide compound that works both as structural element for the resonator and functional magnetic layer. Suspended trampolines are realized in a single step process from LSMO thin films and show quality factor up to 60k and fQ products reaching 10$^{10}$ Hz. Their magnetic properties are probed by a SQUID magnetometer and magnetic force microscopy, showing saturation magnetization of 240 kA/m at room temperature and in-plane magnetic domains with coercivity of 2.5 mT. Being entirely made from a magnetic material, these resonators exhibit a larger magnetic interaction volume compared to other solutions, making them ideal candidates as building blocks for high-sensitivity magnetic field sensors.
title Magnetic Trampoline Resonators from (La,Sr)MnO3 Single-Crystal Thin Films
topic Applied Physics
Materials Science
Strongly Correlated Electrons
url https://arxiv.org/abs/2501.12177