Cavity-based compact light source for extreme ultraviolet lithography

Fuente: arXiv

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Bibliographic Details
Main Authors:	He, Changchao, Yang, Hanxiang, Huang, Nanshun, Liu, Bo, Deng, Haixiao
Format:	Preprint
Published:	2025
Subjects:	Accelerator Physics
Online Access:	Acceder al recurso
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Internet

https://arxiv.org/abs/2501.14541