Overlay-aware Variation Study of Flip FET and Benchmark with CFET

Fuente: arXiv

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Bibliographic Details
Main Authors:	Peng, Wanyue, Lu, Haoran, Jiang, Jingru, Sun, Jiacheng, Li, Ming, Wang, Runsheng, Wu, Heng, Huang, Ru
Format:	Preprint
Published:	2025
Subjects:	Mesoscale and Nanoscale Physics
Online Access:	Acceder al recurso
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Internet

https://arxiv.org/abs/2501.16063