Tuning the surface energy of fluorinated diamond-like carbon coatings via plasma immersion ion implantation plasma-enhanced chemical vapor deposition with 1,1,1,2-tetrafluoroethane

Fuente: arXiv
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Bibliographic Details
Main Authors: Tong, Yuhan, Zahedian, Maryam, Zeng, Aiping, Vidrio, Ricardo, Efremov, Mike, Yin, Shenwei, Mei, Hongyan, Heaney, Patrick, Choy, Jennifer T.
Format: Preprint
Published: 2025
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