Tuning the surface energy of fluorinated diamond-like carbon coatings via plasma immersion ion implantation plasma-enhanced chemical vapor deposition with 1,1,1,2-tetrafluoroethane

Fuente: arXiv
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Hauptverfasser: Tong, Yuhan, Zahedian, Maryam, Zeng, Aiping, Vidrio, Ricardo, Efremov, Mike, Yin, Shenwei, Mei, Hongyan, Heaney, Patrick, Choy, Jennifer T.
Format: Preprint
Veröffentlicht: 2025
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author Tong, Yuhan
Zahedian, Maryam
Zeng, Aiping
Vidrio, Ricardo
Efremov, Mike
Yin, Shenwei
Mei, Hongyan
Heaney, Patrick
Choy, Jennifer T.
author_facet Tong, Yuhan
Zahedian, Maryam
Zeng, Aiping
Vidrio, Ricardo
Efremov, Mike
Yin, Shenwei
Mei, Hongyan
Heaney, Patrick
Choy, Jennifer T.
contents We demonstrate an environmentally friendly and scalable method to create fluorine-doped diamond-like carbon (F-DLC) coatings using plasma immersion ion implantation plasma-enhanced chemical vapor deposition (PIII-PECVD) with 1,1,1,2-tetrafluoroethane. F-DLC films tend to have low wettability and good mechanical flexibility, which make them suitable for applications in biomedical devices and antibiofouling surfaces. We report on the effects of fluorine incorporation on the surface chemistry, surface energy, and morphology of these coatings, showing that our method is effective in increasing the fluorine content in the F-DLC up to 40%. We show that the addition of fluorine leads to a decrease in surface energy, which is consistent with a reduction in surface wettability.
format Preprint
id arxiv_https___arxiv_org_abs_2502_00985
institution arXiv
publishDate 2025
record_format arxiv
spellingShingle Tuning the surface energy of fluorinated diamond-like carbon coatings via plasma immersion ion implantation plasma-enhanced chemical vapor deposition with 1,1,1,2-tetrafluoroethane
Tong, Yuhan
Zahedian, Maryam
Zeng, Aiping
Vidrio, Ricardo
Efremov, Mike
Yin, Shenwei
Mei, Hongyan
Heaney, Patrick
Choy, Jennifer T.
Materials Science
We demonstrate an environmentally friendly and scalable method to create fluorine-doped diamond-like carbon (F-DLC) coatings using plasma immersion ion implantation plasma-enhanced chemical vapor deposition (PIII-PECVD) with 1,1,1,2-tetrafluoroethane. F-DLC films tend to have low wettability and good mechanical flexibility, which make them suitable for applications in biomedical devices and antibiofouling surfaces. We report on the effects of fluorine incorporation on the surface chemistry, surface energy, and morphology of these coatings, showing that our method is effective in increasing the fluorine content in the F-DLC up to 40%. We show that the addition of fluorine leads to a decrease in surface energy, which is consistent with a reduction in surface wettability.
title Tuning the surface energy of fluorinated diamond-like carbon coatings via plasma immersion ion implantation plasma-enhanced chemical vapor deposition with 1,1,1,2-tetrafluoroethane
topic Materials Science
url https://arxiv.org/abs/2502.00985