Acoustic resonators above 100 GHz

Fuente: arXiv
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Hauptverfasser: Kramer, Jack, Bosworth, Bryan T., Matto, Lezli, Jungwirth, Nicholas R., Barrera, Omar, Bergmann, Florian, Cho, Sinwoo, Chulukhadze, Vakhtang, Goorsky, Mark, Orloff, Nathan D., Lu, Ruochen
Format: Preprint
Veröffentlicht: 2025
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author Kramer, Jack
Bosworth, Bryan T.
Matto, Lezli
Jungwirth, Nicholas R.
Barrera, Omar
Bergmann, Florian
Cho, Sinwoo
Chulukhadze, Vakhtang
Goorsky, Mark
Orloff, Nathan D.
Lu, Ruochen
author_facet Kramer, Jack
Bosworth, Bryan T.
Matto, Lezli
Jungwirth, Nicholas R.
Barrera, Omar
Bergmann, Florian
Cho, Sinwoo
Chulukhadze, Vakhtang
Goorsky, Mark
Orloff, Nathan D.
Lu, Ruochen
contents Piezoelectric resonators are a common building block for signal processing because of their miniature size, low insertion loss, and high quality factor. As consumer electronics push to millimeter waves frequencies, designers must increase the operating frequency of the resonator. The current state-of-the-art approach to increase the operating frequency is to decrease the thickness of the piezoelectric film to shorten the acoustic wavelength or to use higher order modes. Unfortunately, maintaining high crystal quality typically requires thicker piezoelectric layers. Thinner layers suffer from higher defect densities and increased surface damping, which degrade the electromechanical coupling and quality factor. While acoustic high order modes can also increase operating frequency, the electromechanical coupling rapidly decreases with increasing mode number. Here, we overcome these limitations by utilizing a piezoelectric stack of three layers of lithium niobate with alternating crystallographic orientations to preferentially support higher order modes and thereby enhance the electromechanical coupling without degrading the quality factor. Our approach improves the figure of merit of millimeter-wave acoustic resonators by roughly an order of magnitude greater compared to state-of-the-art piezoelectric resonators above 60 GHz. This concept of alternating crystallographic orientations facilitates a new path to develop millimeter wave resonators with high figures of merit, low insertion loss, and miniature footprints, enabling new applications in millimeter wave signal processing and computing.
format Preprint
id arxiv_https___arxiv_org_abs_2502_03632
institution arXiv
publishDate 2025
record_format arxiv
spellingShingle Acoustic resonators above 100 GHz
Kramer, Jack
Bosworth, Bryan T.
Matto, Lezli
Jungwirth, Nicholas R.
Barrera, Omar
Bergmann, Florian
Cho, Sinwoo
Chulukhadze, Vakhtang
Goorsky, Mark
Orloff, Nathan D.
Lu, Ruochen
Applied Physics
Piezoelectric resonators are a common building block for signal processing because of their miniature size, low insertion loss, and high quality factor. As consumer electronics push to millimeter waves frequencies, designers must increase the operating frequency of the resonator. The current state-of-the-art approach to increase the operating frequency is to decrease the thickness of the piezoelectric film to shorten the acoustic wavelength or to use higher order modes. Unfortunately, maintaining high crystal quality typically requires thicker piezoelectric layers. Thinner layers suffer from higher defect densities and increased surface damping, which degrade the electromechanical coupling and quality factor. While acoustic high order modes can also increase operating frequency, the electromechanical coupling rapidly decreases with increasing mode number. Here, we overcome these limitations by utilizing a piezoelectric stack of three layers of lithium niobate with alternating crystallographic orientations to preferentially support higher order modes and thereby enhance the electromechanical coupling without degrading the quality factor. Our approach improves the figure of merit of millimeter-wave acoustic resonators by roughly an order of magnitude greater compared to state-of-the-art piezoelectric resonators above 60 GHz. This concept of alternating crystallographic orientations facilitates a new path to develop millimeter wave resonators with high figures of merit, low insertion loss, and miniature footprints, enabling new applications in millimeter wave signal processing and computing.
title Acoustic resonators above 100 GHz
topic Applied Physics
url https://arxiv.org/abs/2502.03632