TorchResist: Open-Source Differentiable Resist Simulator

Fuente: arXiv

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Bibliographic Details
Main Authors:	Wang, Zixiao, Zhou, Jieya, Zheng, Su, Yin, Shuo, Liang, Kaichao, Hu, Shoubo, Chen, Xiao, Yu, Bei
Format:	Preprint
Published:	2025
Subjects:	Machine Learning
Online Access:	Acceder al recurso
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Internet

https://arxiv.org/abs/2502.06838