_version_ 1866911609221283840
author Ha, Sieu D.
Acuna, Edwin
Raach, Kate
Bloom, Zachery T.
Brecht, Teresa L.
Chappell, James M.
Choi, Maxwell D.
Christensen, Justin E.
Counts, Ian T.
Daprano, Dominic
Dodson, J. P.
Eng, Kevin
Fialkow, David J.
Garcia, Christina A. C.
Ha, Wonill
Harris, Thomas R. B.
holman, nathan
Khalaf, Isaac
Matten, Justine W.
Peterson, Christi A.
Plesha, Clifford E.
Ruiz, Matthew J.
Smith, Aaron
Thomas, Bryan J.
Whiteley, Samuel J.
Ladd, Thaddeus D.
Jura, Michael P.
Rakher, Matthew T.
Borselli, Matthew G.
author_facet Ha, Sieu D.
Acuna, Edwin
Raach, Kate
Bloom, Zachery T.
Brecht, Teresa L.
Chappell, James M.
Choi, Maxwell D.
Christensen, Justin E.
Counts, Ian T.
Daprano, Dominic
Dodson, J. P.
Eng, Kevin
Fialkow, David J.
Garcia, Christina A. C.
Ha, Wonill
Harris, Thomas R. B.
holman, nathan
Khalaf, Isaac
Matten, Justine W.
Peterson, Christi A.
Plesha, Clifford E.
Ruiz, Matthew J.
Smith, Aaron
Thomas, Bryan J.
Whiteley, Samuel J.
Ladd, Thaddeus D.
Jura, Michael P.
Rakher, Matthew T.
Borselli, Matthew G.
contents The promise of quantum computation is contingent upon physical qubits with both low gate error rate and broad scalability. Silicon-based spins are a leading qubit platform, but demonstrations to date have not utilized fabrication processes capable of extending arrays in two dimensions while maintaining complete control of individual spins. Here, we implement an interconnect process, common in semiconductor manufacturing, with multiple back-end-of-line layers to show an extendable two-dimensional array of spins with fully controllable nearest-neighbor exchange interactions. In a device using three interconnect layers, we encode exchange-only qubits and achieve average single-qubit gate fidelities consistent with single-layer devices, including fidelities greater than 99.9%, as measured by blind randomized benchmarking. Moreover, with spin connectivity in two dimensions, we show that both linear and right-angle exchange-only qubits with high performance can be formed, enabling qubit array reconfigurability in the presence of defects. This extendable device platform demonstrates that industrial manufacturing techniques can be leveraged for scalable spin qubit technologies.
format Preprint
id arxiv_https___arxiv_org_abs_2502_08861
institution arXiv
publishDate 2025
record_format arxiv
spellingShingle Two-dimensional Si spin qubit arrays with multilevel interconnects
Ha, Sieu D.
Acuna, Edwin
Raach, Kate
Bloom, Zachery T.
Brecht, Teresa L.
Chappell, James M.
Choi, Maxwell D.
Christensen, Justin E.
Counts, Ian T.
Daprano, Dominic
Dodson, J. P.
Eng, Kevin
Fialkow, David J.
Garcia, Christina A. C.
Ha, Wonill
Harris, Thomas R. B.
holman, nathan
Khalaf, Isaac
Matten, Justine W.
Peterson, Christi A.
Plesha, Clifford E.
Ruiz, Matthew J.
Smith, Aaron
Thomas, Bryan J.
Whiteley, Samuel J.
Ladd, Thaddeus D.
Jura, Michael P.
Rakher, Matthew T.
Borselli, Matthew G.
Quantum Physics
Mesoscale and Nanoscale Physics
The promise of quantum computation is contingent upon physical qubits with both low gate error rate and broad scalability. Silicon-based spins are a leading qubit platform, but demonstrations to date have not utilized fabrication processes capable of extending arrays in two dimensions while maintaining complete control of individual spins. Here, we implement an interconnect process, common in semiconductor manufacturing, with multiple back-end-of-line layers to show an extendable two-dimensional array of spins with fully controllable nearest-neighbor exchange interactions. In a device using three interconnect layers, we encode exchange-only qubits and achieve average single-qubit gate fidelities consistent with single-layer devices, including fidelities greater than 99.9%, as measured by blind randomized benchmarking. Moreover, with spin connectivity in two dimensions, we show that both linear and right-angle exchange-only qubits with high performance can be formed, enabling qubit array reconfigurability in the presence of defects. This extendable device platform demonstrates that industrial manufacturing techniques can be leveraged for scalable spin qubit technologies.
title Two-dimensional Si spin qubit arrays with multilevel interconnects
topic Quantum Physics
Mesoscale and Nanoscale Physics
url https://arxiv.org/abs/2502.08861