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Main Authors: Wang, Yuanlei, Wang, Ze, Lao, Chenghao, Xu, Tianyu, Cheng, Yinke, Xie, Zhenyu, Wang, Junqi, Luo, Haoyang, Zhou, Xin, Ni, Bo, Zhu, Kaixuan, Liu, Yanwu, Jin, Xing, Wang, Min, Liu, Jian-Fei, Cao, Xuening, Wang, Ting, Gong, Qihuang, Li, Bei-Bei, Zhang, Fangxing, Xiao, Yun-Feng, Yang, Qi-Fan
Format: Preprint
Published: 2025
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Online Access:https://arxiv.org/abs/2502.10941
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author Wang, Yuanlei
Wang, Ze
Lao, Chenghao
Xu, Tianyu
Cheng, Yinke
Xie, Zhenyu
Wang, Junqi
Luo, Haoyang
Zhou, Xin
Ni, Bo
Zhu, Kaixuan
Liu, Yanwu
Jin, Xing
Wang, Min
Liu, Jian-Fei
Cao, Xuening
Wang, Ting
Gong, Qihuang
Li, Bei-Bei
Zhang, Fangxing
Xiao, Yun-Feng
Yang, Qi-Fan
author_facet Wang, Yuanlei
Wang, Ze
Lao, Chenghao
Xu, Tianyu
Cheng, Yinke
Xie, Zhenyu
Wang, Junqi
Luo, Haoyang
Zhou, Xin
Ni, Bo
Zhu, Kaixuan
Liu, Yanwu
Jin, Xing
Wang, Min
Liu, Jian-Fei
Cao, Xuening
Wang, Ting
Gong, Qihuang
Li, Bei-Bei
Zhang, Fangxing
Xiao, Yun-Feng
Yang, Qi-Fan
contents Soliton microcombs generated in nonlinear microresonators facilitate the photonic integration of timing, frequency synthesis, and astronomical calibration functionalities. For these applications, low-repetition-rate soliton microcombs are essential as they establish a coherent link between optical and microwave signals. However, the required pump power typically scales with the inverse of the repetition rate, and the device footprint scales with the inverse of square of the repetition rate, rendering low-repetition-rate soliton microcombs challenging to integrate within photonic circuits. This study designs and fabricates silicon nitride microresonators on 4-inch wafers with highly compact form factors. The resonator geometries are engineered from ring to finger and spiral shapes to enhance integration density while attaining quality factors over 10^7. Driven directly by an integrated laser, soliton microcombs with repetition rates below 10 GHz are demonstrated via turnkey initiation. The phase noise performance of the synthesized microwave signals reaches -130 dBc/Hz at 100 kHz offset frequency for 10 GHz carrier frequencies. This work enables the high-density integration of soliton microcombs for chip-based microwave photonics and spectroscopy applications.
format Preprint
id arxiv_https___arxiv_org_abs_2502_10941
institution arXiv
publishDate 2025
record_format arxiv
spellingShingle Compact Turnkey Soliton Microcombs at Microwave Rates via Wafer-Scale Fabrication
Wang, Yuanlei
Wang, Ze
Lao, Chenghao
Xu, Tianyu
Cheng, Yinke
Xie, Zhenyu
Wang, Junqi
Luo, Haoyang
Zhou, Xin
Ni, Bo
Zhu, Kaixuan
Liu, Yanwu
Jin, Xing
Wang, Min
Liu, Jian-Fei
Cao, Xuening
Wang, Ting
Gong, Qihuang
Li, Bei-Bei
Zhang, Fangxing
Xiao, Yun-Feng
Yang, Qi-Fan
Optics
Soliton microcombs generated in nonlinear microresonators facilitate the photonic integration of timing, frequency synthesis, and astronomical calibration functionalities. For these applications, low-repetition-rate soliton microcombs are essential as they establish a coherent link between optical and microwave signals. However, the required pump power typically scales with the inverse of the repetition rate, and the device footprint scales with the inverse of square of the repetition rate, rendering low-repetition-rate soliton microcombs challenging to integrate within photonic circuits. This study designs and fabricates silicon nitride microresonators on 4-inch wafers with highly compact form factors. The resonator geometries are engineered from ring to finger and spiral shapes to enhance integration density while attaining quality factors over 10^7. Driven directly by an integrated laser, soliton microcombs with repetition rates below 10 GHz are demonstrated via turnkey initiation. The phase noise performance of the synthesized microwave signals reaches -130 dBc/Hz at 100 kHz offset frequency for 10 GHz carrier frequencies. This work enables the high-density integration of soliton microcombs for chip-based microwave photonics and spectroscopy applications.
title Compact Turnkey Soliton Microcombs at Microwave Rates via Wafer-Scale Fabrication
topic Optics
url https://arxiv.org/abs/2502.10941