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Effect of Annealing on Al Diffusion and its Impact on the Properties of Ga$_2$O$_3$ Thin Films Deposited on c-plane Sapphire by RF Sputtering

Fuente: arXiv

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Détails bibliographiques
Auteurs principaux:	Sousa, Ana Sofia, Esteves, Duarte M., Robalo, Tiago T., Rodrigues, Mário S., Santos, Luís F., Lorenz, Katharina, Peres, Marco
Format:	Preprint
Publié:	2025
Sujets:	Materials Science Mesoscale and Nanoscale Physics
Accès en ligne:	Acceder al recurso
Tags:	Ajouter un tag Pas de tags, Soyez le premier à ajouter un tag!

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