Characterization of ion track etched conical nanopores in thermal and PECVD SiO$_{2}$ using small angle X-ray scattering

Fuente: arXiv

Saved in:

Bibliographic Details
Main Authors:	Dutt, Shankar, Chakraborty, Rudradeep, Notthoff, Christian, Mota-Santiago, Pablo, Trautmann, Christina, Kluth, Patrick
Format:	Preprint
Published:	2025
Subjects:	Applied Physics Materials Science
Online Access:	Acceder al recurso
Tags:	Add Tag No Tags, Be the first to tag this record!

Internet

https://arxiv.org/abs/2502.14118