Thermally-induced microstructural evolution in nanoparticle-based CuO, WO$_3$ and CuO-WO$_3$ thin films for hydrogen gas sensing

Fuente: arXiv
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Autori principali: Shaji, Kalyani, Haviar, Stanislav, Zeman, Petr, Procházka, Michal, Čerstvý, Radomír, Kumar, Nirmal, Čapek, Jiří
Natura: Preprint
Pubblicazione: 2025
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author Shaji, Kalyani
Haviar, Stanislav
Zeman, Petr
Procházka, Michal
Čerstvý, Radomír
Kumar, Nirmal
Čapek, Jiří
author_facet Shaji, Kalyani
Haviar, Stanislav
Zeman, Petr
Procházka, Michal
Čerstvý, Radomír
Kumar, Nirmal
Čapek, Jiří
contents This study systematically investigates the microstructural evolution of nanoparticle-based CuO, WO$_3$, and composite 'CuO-WO$_3$' thin films induced by their post-deposition annealing. The films were reactively deposited using a magnetron-based gas aggregation technique, with the composite films consisting of alternating monolayers of CuO and WO$_3$ nanoparticles. After deposition, the films were annealed in synthetic air at temperatures ranging from 200 to 400$^\circ$C and characterized using scanning electron microscopy, X-ray diffraction, Raman spectroscopy, and X-ray photoelectron spectroscopy. Annealing of the CuO films led to the most pronounced changes associated with a gradual enhancement of crystallinity accompanied by significant particle growth with increasing annealing temperature, while the WO$_3$ and CuO-WO$_3$ films were more thermally stable to crystallization and particle growth. Notably, at 400$^\circ$C, the CuO--WO$_3$ films crystallized into a novel $γ$-CuWO$_4$ phase. The annealed films were further evaluated for their gas-sensing performance upon H$_2$ exposure and the obtained results were analyzed in relation to film properties and the microstructural evolution induced by annealing.
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id arxiv_https___arxiv_org_abs_2502_15497
institution arXiv
publishDate 2025
record_format arxiv
spellingShingle Thermally-induced microstructural evolution in nanoparticle-based CuO, WO$_3$ and CuO-WO$_3$ thin films for hydrogen gas sensing
Shaji, Kalyani
Haviar, Stanislav
Zeman, Petr
Procházka, Michal
Čerstvý, Radomír
Kumar, Nirmal
Čapek, Jiří
Materials Science
This study systematically investigates the microstructural evolution of nanoparticle-based CuO, WO$_3$, and composite 'CuO-WO$_3$' thin films induced by their post-deposition annealing. The films were reactively deposited using a magnetron-based gas aggregation technique, with the composite films consisting of alternating monolayers of CuO and WO$_3$ nanoparticles. After deposition, the films were annealed in synthetic air at temperatures ranging from 200 to 400$^\circ$C and characterized using scanning electron microscopy, X-ray diffraction, Raman spectroscopy, and X-ray photoelectron spectroscopy. Annealing of the CuO films led to the most pronounced changes associated with a gradual enhancement of crystallinity accompanied by significant particle growth with increasing annealing temperature, while the WO$_3$ and CuO-WO$_3$ films were more thermally stable to crystallization and particle growth. Notably, at 400$^\circ$C, the CuO--WO$_3$ films crystallized into a novel $γ$-CuWO$_4$ phase. The annealed films were further evaluated for their gas-sensing performance upon H$_2$ exposure and the obtained results were analyzed in relation to film properties and the microstructural evolution induced by annealing.
title Thermally-induced microstructural evolution in nanoparticle-based CuO, WO$_3$ and CuO-WO$_3$ thin films for hydrogen gas sensing
topic Materials Science
url https://arxiv.org/abs/2502.15497