Holes in silicon are heavier than expected: transport properties of extremely high mobility electrons and holes in silicon MOSFETs

Fuente: arXiv
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Autori principali: Wendoloski, J. P., Hillier, J., Liles, S. D., Rendell, M., Ashlea-Alava, Y., Raes, B., Li, R., Kubicek, S., Godfrin, C., Jussot, J., Beyne, S., Wan, D., Rahman, Md. M., Yianni, S., Chan, K. W., Hudson, F. E., Lim, W. H., De Greve, K., Dzurak, A. S., Hamilton, A. R.
Natura: Preprint
Pubblicazione: 2025
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author Wendoloski, J. P.
Hillier, J.
Liles, S. D.
Rendell, M.
Ashlea-Alava, Y.
Raes, B.
Li, R.
Kubicek, S.
Godfrin, C.
Jussot, J.
Beyne, S.
Wan, D.
Rahman, Md. M.
Yianni, S.
Chan, K. W.
Hudson, F. E.
Lim, W. H.
De Greve, K.
Dzurak, A. S.
Hamilton, A. R.
author_facet Wendoloski, J. P.
Hillier, J.
Liles, S. D.
Rendell, M.
Ashlea-Alava, Y.
Raes, B.
Li, R.
Kubicek, S.
Godfrin, C.
Jussot, J.
Beyne, S.
Wan, D.
Rahman, Md. M.
Yianni, S.
Chan, K. W.
Hudson, F. E.
Lim, W. H.
De Greve, K.
Dzurak, A. S.
Hamilton, A. R.
contents The quality of the silicon-oxide interface plays a crucial role in fabricating reproducible silicon spin qubits. In this work we characterize interface quality by performing mobility measurements on silicon Hall bars. We find a peak electron mobility of nearly $40,000\,\text{cm}^2/\text{Vs}$ in a device with a $21\,\text{nm}$ oxide layer, and a peak hole mobility of about $2,000\,\text{cm}^2/\text{Vs}$ in a device with $8\,\text{nm}$ oxide, the latter being the highest recorded mobility for a p-type silicon MOSFET. Despite the high device quality, we note an order-of-magnitude difference in mobility between electrons and holes. By studying additional n-type and p-type devices with identical oxides, and fitting to transport theory, we show that this mobility discrepancy is due to valence band nonparabolicity. The nonparabolicity endows holes with a density-dependent transverse effective mass ranging from $0.6m_0$ to $0.7m_0$, significantly larger than the usually quoted bend-edge mass of $0.22m_0$. Finally, we perform magnetotransport measurements to extract momentum and quantum scattering lifetimes.
format Preprint
id arxiv_https___arxiv_org_abs_2502_21173
institution arXiv
publishDate 2025
record_format arxiv
spellingShingle Holes in silicon are heavier than expected: transport properties of extremely high mobility electrons and holes in silicon MOSFETs
Wendoloski, J. P.
Hillier, J.
Liles, S. D.
Rendell, M.
Ashlea-Alava, Y.
Raes, B.
Li, R.
Kubicek, S.
Godfrin, C.
Jussot, J.
Beyne, S.
Wan, D.
Rahman, Md. M.
Yianni, S.
Chan, K. W.
Hudson, F. E.
Lim, W. H.
De Greve, K.
Dzurak, A. S.
Hamilton, A. R.
Mesoscale and Nanoscale Physics
The quality of the silicon-oxide interface plays a crucial role in fabricating reproducible silicon spin qubits. In this work we characterize interface quality by performing mobility measurements on silicon Hall bars. We find a peak electron mobility of nearly $40,000\,\text{cm}^2/\text{Vs}$ in a device with a $21\,\text{nm}$ oxide layer, and a peak hole mobility of about $2,000\,\text{cm}^2/\text{Vs}$ in a device with $8\,\text{nm}$ oxide, the latter being the highest recorded mobility for a p-type silicon MOSFET. Despite the high device quality, we note an order-of-magnitude difference in mobility between electrons and holes. By studying additional n-type and p-type devices with identical oxides, and fitting to transport theory, we show that this mobility discrepancy is due to valence band nonparabolicity. The nonparabolicity endows holes with a density-dependent transverse effective mass ranging from $0.6m_0$ to $0.7m_0$, significantly larger than the usually quoted bend-edge mass of $0.22m_0$. Finally, we perform magnetotransport measurements to extract momentum and quantum scattering lifetimes.
title Holes in silicon are heavier than expected: transport properties of extremely high mobility electrons and holes in silicon MOSFETs
topic Mesoscale and Nanoscale Physics
url https://arxiv.org/abs/2502.21173