A Study of Superconducting Behavior in Ruthenium Thin Films

Fuente: arXiv
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Main Authors: Langa Jr., Bernardo, Henry, Brooke, Lainez, Ivan, Haight, Richard, Sardashti, Kasra
Format: Preprint
Published: 2025
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author Langa Jr., Bernardo
Henry, Brooke
Lainez, Ivan
Haight, Richard
Sardashti, Kasra
author_facet Langa Jr., Bernardo
Henry, Brooke
Lainez, Ivan
Haight, Richard
Sardashti, Kasra
contents Ruthenium (Ru) is a promising candidate for the next-generation of electronic interconnects due to its low resistivity, small mean free path, and superior electromigration reliability at nanometer scales. Additionally, Ru exhibits superconductivity below 1 K, with resistance to oxidation, low diffusivity, and a small superconducting gap, making it a potential material for superconducting qubits and Josephson Junctions. Here, we investigate the superconducting behavior of Ru thin films (11.9 - 108.5 nm thick), observing transition temperatures from 657.9 mK to 557 mK. A weak thickness dependence appears in the thinnest films, followed by a conventional inverse thickness dependence in thicker films. Magnetotransport studies reveal type-II superconductivity in the dirty limit (ξ >> l), with coherence lengths ranging from 13.5 nm to 27 nm. Finally, oxidation resistance studies confirm minimal RuOx growth after seven weeks of air exposure. These findings provide key insights for integrating Ru into superconducting electronic devices.
format Preprint
id arxiv_https___arxiv_org_abs_2503_00233
institution arXiv
publishDate 2025
record_format arxiv
spellingShingle A Study of Superconducting Behavior in Ruthenium Thin Films
Langa Jr., Bernardo
Henry, Brooke
Lainez, Ivan
Haight, Richard
Sardashti, Kasra
Superconductivity
Quantum Physics
Ruthenium (Ru) is a promising candidate for the next-generation of electronic interconnects due to its low resistivity, small mean free path, and superior electromigration reliability at nanometer scales. Additionally, Ru exhibits superconductivity below 1 K, with resistance to oxidation, low diffusivity, and a small superconducting gap, making it a potential material for superconducting qubits and Josephson Junctions. Here, we investigate the superconducting behavior of Ru thin films (11.9 - 108.5 nm thick), observing transition temperatures from 657.9 mK to 557 mK. A weak thickness dependence appears in the thinnest films, followed by a conventional inverse thickness dependence in thicker films. Magnetotransport studies reveal type-II superconductivity in the dirty limit (ξ >> l), with coherence lengths ranging from 13.5 nm to 27 nm. Finally, oxidation resistance studies confirm minimal RuOx growth after seven weeks of air exposure. These findings provide key insights for integrating Ru into superconducting electronic devices.
title A Study of Superconducting Behavior in Ruthenium Thin Films
topic Superconductivity
Quantum Physics
url https://arxiv.org/abs/2503.00233