Local Rational Modeling for Identification Beyond the Nyquist Frequency: Applied to a Prototype Wafer Stage

Fuente: arXiv

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Bibliographic Details
Main Authors:	van Haren, Max, Blanken, Lennart, Classens, Koen, Oomen, Tom
Format:	Preprint
Published:	2025
Subjects:	Systems and Control
Online Access:	Acceder al recurso
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Internet

https://arxiv.org/abs/2503.01344