Local Rational Modeling for Identification Beyond the Nyquist Frequency: Applied to a Prototype Wafer Stage
Fuente:
arXiv
Enregistré dans:
| Auteurs principaux: | , , , |
|---|---|
| Format: | Preprint |
| Publié: |
2025
|
| Sujets: | |
| Accès en ligne: | |
| Tags: |
Ajouter un tag
Pas de tags, Soyez le premier à ajouter un tag!
|
| _version_ | 1866908631739400192 |
|---|---|
| author | van Haren, Max Blanken, Lennart Classens, Koen Oomen, Tom |
| author_facet | van Haren, Max Blanken, Lennart Classens, Koen Oomen, Tom |
| contents | Fast-rate models are essential for control design, specifically to address intersample behavior. The aim of this paper is to develop a frequency-domain non-parametric identification technique to estimate fast-rate models of systems that have relevant dynamics and allow for actuation above the Nyquist frequency of a slow-rate output. Examples of such systems include vision-in-the-loop systems. Through local rational models over multiple frequency bands, aliased components are effectively disentangled, particularly for lightly-damped systems. The developed technique accurately determines non-parametric fast-rate models of systems with slow-rate outputs, all within a single identification experiment. Finally, the effectiveness of the technique is demonstrated through experiments conducted on a prototype wafer stage used for semiconductor manufacturing. |
| format | Preprint |
| id |
arxiv_https___arxiv_org_abs_2503_01344 |
| institution | arXiv |
| publishDate | 2025 |
| record_format | arxiv |
| spellingShingle | Local Rational Modeling for Identification Beyond the Nyquist Frequency: Applied to a Prototype Wafer Stage van Haren, Max Blanken, Lennart Classens, Koen Oomen, Tom Systems and Control Fast-rate models are essential for control design, specifically to address intersample behavior. The aim of this paper is to develop a frequency-domain non-parametric identification technique to estimate fast-rate models of systems that have relevant dynamics and allow for actuation above the Nyquist frequency of a slow-rate output. Examples of such systems include vision-in-the-loop systems. Through local rational models over multiple frequency bands, aliased components are effectively disentangled, particularly for lightly-damped systems. The developed technique accurately determines non-parametric fast-rate models of systems with slow-rate outputs, all within a single identification experiment. Finally, the effectiveness of the technique is demonstrated through experiments conducted on a prototype wafer stage used for semiconductor manufacturing. |
| title | Local Rational Modeling for Identification Beyond the Nyquist Frequency: Applied to a Prototype Wafer Stage |
| topic | Systems and Control |
| url | https://arxiv.org/abs/2503.01344 |