van der Hulst, M., González, R. A., Classens, K., Tacx, P., Dirkx, N., van de Wijdeven, J., & Oomen, T. (2025). Frequency domain identification for multivariable motion control systems: Applied to a prototype wafer stage.
Chicago Style (17th ed.) Citationvan der Hulst, M., R. A. González, K. Classens, P. Tacx, N. Dirkx, J. van de Wijdeven, and T. Oomen. Frequency Domain Identification for Multivariable Motion Control Systems: Applied to a Prototype Wafer Stage. 2025.
MLA (9th ed.) Citationvan der Hulst, M., et al. Frequency Domain Identification for Multivariable Motion Control Systems: Applied to a Prototype Wafer Stage. 2025.
Warning: These citations may not always be 100% accurate.