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Frequency domain identification for multivariable motion control systems: Applied to a prototype wafer stage

Fuente: arXiv

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Détails bibliographiques
Auteurs principaux:	van der Hulst, M., González, R. A., Classens, K., Tacx, P., Dirkx, N., van de Wijdeven, J., Oomen, T.
Format:	Preprint
Publié:	2025
Sujets:	Systems and Control
Accès en ligne:	Acceder al recurso
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