Frequency domain identification for multivariable motion control systems: Applied to a prototype wafer stage

Documenti analoghi

• Structured identification of multivariable modal systems
  di: van der Hulst, Maarten, et al.
  Pubblicazione: (2025)
• Identification of additive multivariable continuous-time systems
  di: van der Hulst, Maarten, et al.
  Pubblicazione: (2025)
• Nullspace-based Fault Diagnosis for Closed-Loop Mechatronic Systems with Application to Semiconductor Equipment
  di: Classens, Koen, et al.
  Pubblicazione: (2026)
• Statistically Optimal Structured Additive MIMO Continuous-time System Identification
  di: González, Rodrigo A., et al.
  Pubblicazione: (2025)
• Local Rational Modeling for Identification Beyond the Nyquist Frequency: Applied to a Prototype Wafer Stage
  di: van Haren, Max, et al.
  Pubblicazione: (2025)