Li, Y., Chen, H., & Tsung, F. (2025). Vibration Analysis and Mitigation in Semiconductor Motion Stages Using DMAIC Methodology- A Case Study.
Chicago Style (17th ed.) CitationLi, Yin, Hua Chen, and Fugee Tsung. Vibration Analysis and Mitigation in Semiconductor Motion Stages Using DMAIC Methodology- A Case Study. 2025.
MLA (9th ed.) CitationLi, Yin, et al. Vibration Analysis and Mitigation in Semiconductor Motion Stages Using DMAIC Methodology- A Case Study. 2025.
Warning: These citations may not always be 100% accurate.