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Vibration Analysis and Mitigation in Semiconductor Motion Stages Using DMAIC Methodology- A Case Study

Fuente: arXiv

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Detalles Bibliográficos
Autores principales:	Li, Yin, Chen, Hua, Tsung, Fugee
Formato:	Preprint
Publicado:	2025
Materias:	Systems and Control
Acceso en línea:	Acceder al recurso
Etiquetas:	Agregar Etiqueta Sin Etiquetas, Sea el primero en etiquetar este registro!

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