Soft X-ray imaging with coherence tomography in the water window spectral range using high-harmonic generation
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| Main Authors: | , , , , , , , , , , , , , , , , , |
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| Format: | Preprint |
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2025
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| _version_ | 1866912262306922496 |
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| author | Reinhard, Julius Wiesner, Felix Sidiropoulos, Themistoklis Hennecke, Martin Kaleta, Sophia Späthe, Julian Abel, Johann Jakob Wünsche, Martin Schmidl, Gabriele Plentz, Jonathan Hübner, Uwe Freiberg, Katharina Apell, Jonathan Lippmann, Stephanie Schnürer, Matthias Eisebitt, Stefan Paulus, Gerhard G. Fuchs, Silvio |
| author_facet | Reinhard, Julius Wiesner, Felix Sidiropoulos, Themistoklis Hennecke, Martin Kaleta, Sophia Späthe, Julian Abel, Johann Jakob Wünsche, Martin Schmidl, Gabriele Plentz, Jonathan Hübner, Uwe Freiberg, Katharina Apell, Jonathan Lippmann, Stephanie Schnürer, Matthias Eisebitt, Stefan Paulus, Gerhard G. Fuchs, Silvio |
| contents | High-harmonic generation (HHG) is used as a source for various imaging applications in the extreme ultraviolet spectral range. It offers spatially coherent radiation and unique elemental contrast with the potential for attosecond time resolution. The unfavorable efficiency scaling to higher photon energies prevented the imaging application in the soft X-ray range so far. In this work we demonstrate the feasibility of using harmonics for imaging in the water window spectral region (284$\,$eV to 532$\,$eV). We achieve nondestructive depth profile imaging in a heterostructure by utilizing a broadband and noise-resistant technique called soft X-ray Coherence Tomography (SXCT) at a high-flux lab-scale HHG source. SXCT is derived from Optical Coherence Tomography, a Fourier based technique, that can use the full bandwidth of the source to reach an axial resolution of 12$\,$nm in this demonstration. The employed source covers the entire water window, with a photon flux exceeding 10$^\text{6}\,$photons/eV/s at a photon energy of 500$\,$eV. We show local cross sections of a sample consisting of Aluminium oxide and Platinum layers of varying thickness on a Zinc oxide substrate. We validate the findings with scanning and transmission electron microscopy after preparation with focused ion beam milling. |
| format | Preprint |
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arxiv_https___arxiv_org_abs_2503_04276 |
| institution | arXiv |
| publishDate | 2025 |
| record_format | arxiv |
| spellingShingle | Soft X-ray imaging with coherence tomography in the water window spectral range using high-harmonic generation Reinhard, Julius Wiesner, Felix Sidiropoulos, Themistoklis Hennecke, Martin Kaleta, Sophia Späthe, Julian Abel, Johann Jakob Wünsche, Martin Schmidl, Gabriele Plentz, Jonathan Hübner, Uwe Freiberg, Katharina Apell, Jonathan Lippmann, Stephanie Schnürer, Matthias Eisebitt, Stefan Paulus, Gerhard G. Fuchs, Silvio Optics Applied Physics High-harmonic generation (HHG) is used as a source for various imaging applications in the extreme ultraviolet spectral range. It offers spatially coherent radiation and unique elemental contrast with the potential for attosecond time resolution. The unfavorable efficiency scaling to higher photon energies prevented the imaging application in the soft X-ray range so far. In this work we demonstrate the feasibility of using harmonics for imaging in the water window spectral region (284$\,$eV to 532$\,$eV). We achieve nondestructive depth profile imaging in a heterostructure by utilizing a broadband and noise-resistant technique called soft X-ray Coherence Tomography (SXCT) at a high-flux lab-scale HHG source. SXCT is derived from Optical Coherence Tomography, a Fourier based technique, that can use the full bandwidth of the source to reach an axial resolution of 12$\,$nm in this demonstration. The employed source covers the entire water window, with a photon flux exceeding 10$^\text{6}\,$photons/eV/s at a photon energy of 500$\,$eV. We show local cross sections of a sample consisting of Aluminium oxide and Platinum layers of varying thickness on a Zinc oxide substrate. We validate the findings with scanning and transmission electron microscopy after preparation with focused ion beam milling. |
| title | Soft X-ray imaging with coherence tomography in the water window spectral range using high-harmonic generation |
| topic | Optics Applied Physics |
| url | https://arxiv.org/abs/2503.04276 |