Opaluch, O. R., Westrich, S., Oshnik, N., Fuchs, P., Fait, J., Wolff, S., . . . Neu, E. (2025). Medusa 84 SiH -- A novel high Selectivity Electron Beam Resist for Diamond Quantum Technologies.
Chicago Style (17th ed.) CitationOpaluch, Oliver Roman, et al. Medusa 84 SiH -- A Novel High Selectivity Electron Beam Resist for Diamond Quantum Technologies. 2025.
MLA (9th ed.) CitationOpaluch, Oliver Roman, et al. Medusa 84 SiH -- A Novel High Selectivity Electron Beam Resist for Diamond Quantum Technologies. 2025.
Warning: These citations may not always be 100% accurate.