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Medusa 84 SiH -- A novel high Selectivity Electron Beam Resist for Diamond Quantum Technologies

Fuente: arXiv

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Bibliographic Details
Main Authors:	Opaluch, Oliver Roman, Westrich, Sebastian, Oshnik, Nimba, Fuchs, Philipp, Fait, Jan, Wolff, Sandra, Biller, Harry, Sendel, Mandy, Becher, Christoph, Neu, Elke
Format:	Preprint
Published:	2025
Subjects:	Instrumentation and Detectors Mesoscale and Nanoscale Physics Materials Science Quantum Physics
Online Access:	Acceder al recurso
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