Bright quantum dot light sources using monolithic microlenses on gold back-reflectors

Fuente: arXiv
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Autori principali: Langer, Moritz, Dhurjati, Sai A., Zena, Yared G., Rahimi, Ahmad, Pal, Mandira, Raith, Liesa, Nestler, Sandra, Bassoli, Riccardo, Fitzek, Frank H. P., Schmidt, Oliver G., Hopfmann, Caspar
Natura: Preprint
Pubblicazione: 2025
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author Langer, Moritz
Dhurjati, Sai A.
Zena, Yared G.
Rahimi, Ahmad
Pal, Mandira
Raith, Liesa
Nestler, Sandra
Bassoli, Riccardo
Fitzek, Frank H. P.
Schmidt, Oliver G.
Hopfmann, Caspar
author_facet Langer, Moritz
Dhurjati, Sai A.
Zena, Yared G.
Rahimi, Ahmad
Pal, Mandira
Raith, Liesa
Nestler, Sandra
Bassoli, Riccardo
Fitzek, Frank H. P.
Schmidt, Oliver G.
Hopfmann, Caspar
contents We present the fabrication process of bright $GaAs$ quantum dot (QD) photon sources by non-deterministic embedding into broadband monolithic $Al_{0.15}Ga_{0.85}As$ microlens arrays on gold-coated substrates. Arrays of cylindrical photoresist templates, with diameters ranging from $2$ $μm$ to $5$ $μm$, are thermally reflowed and subsequently transferred into the $Al_{0.15}Ga_{0.85}As$ thin-film semiconductor heterostructure with embedded quantum dots through an optimized anisotropic and three-dimensional shape-preserving reactive ion etching process. This methodology facilitated the fabrication of large-scale ($2$ $mm$ $\times$ $4$ $mm$) and densely packed arrays of uniformly shaped microlenses ($\sim$ $40 \times 10^3$ $mm^{-1}$), with the brightest emissions from QDs embedded in microlenses exhibiting lateral diameters and heights of $2.7$ $μm$ and $1.35$ $μm$, respectively. Finite-difference time-domain simulations of both idealized and fabricated lens shapes provide a comprehensive three-dimensional analysis of the device performance and optimization potentials such as anti-reflection coatings. It is found that free-space extraction (fiber-coupled) efficiencies of up to $62$ $\%$ ($37$ $\%$) are achievable for hemispherical QD-microlenses on gold-coated substrates. A statistical model for the fabrication yield of QD-microlenses is developed and experimentally corroborated by photoluminescence spectroscopy of fabricated microlens arrays. This analysis exhibited a free-space intensity enhancement by factors of up to $\times 200$ in approximately $1$ out of $200$ microlenses, showing good agreement to the theoretical expectations. This scalable fabrication strategy underscores the potential of these compact, high-efficiency sources offering new prospects for applications of these devices in future large-scale quantum networks.
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institution arXiv
publishDate 2025
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spellingShingle Bright quantum dot light sources using monolithic microlenses on gold back-reflectors
Langer, Moritz
Dhurjati, Sai A.
Zena, Yared G.
Rahimi, Ahmad
Pal, Mandira
Raith, Liesa
Nestler, Sandra
Bassoli, Riccardo
Fitzek, Frank H. P.
Schmidt, Oliver G.
Hopfmann, Caspar
Mesoscale and Nanoscale Physics
We present the fabrication process of bright $GaAs$ quantum dot (QD) photon sources by non-deterministic embedding into broadband monolithic $Al_{0.15}Ga_{0.85}As$ microlens arrays on gold-coated substrates. Arrays of cylindrical photoresist templates, with diameters ranging from $2$ $μm$ to $5$ $μm$, are thermally reflowed and subsequently transferred into the $Al_{0.15}Ga_{0.85}As$ thin-film semiconductor heterostructure with embedded quantum dots through an optimized anisotropic and three-dimensional shape-preserving reactive ion etching process. This methodology facilitated the fabrication of large-scale ($2$ $mm$ $\times$ $4$ $mm$) and densely packed arrays of uniformly shaped microlenses ($\sim$ $40 \times 10^3$ $mm^{-1}$), with the brightest emissions from QDs embedded in microlenses exhibiting lateral diameters and heights of $2.7$ $μm$ and $1.35$ $μm$, respectively. Finite-difference time-domain simulations of both idealized and fabricated lens shapes provide a comprehensive three-dimensional analysis of the device performance and optimization potentials such as anti-reflection coatings. It is found that free-space extraction (fiber-coupled) efficiencies of up to $62$ $\%$ ($37$ $\%$) are achievable for hemispherical QD-microlenses on gold-coated substrates. A statistical model for the fabrication yield of QD-microlenses is developed and experimentally corroborated by photoluminescence spectroscopy of fabricated microlens arrays. This analysis exhibited a free-space intensity enhancement by factors of up to $\times 200$ in approximately $1$ out of $200$ microlenses, showing good agreement to the theoretical expectations. This scalable fabrication strategy underscores the potential of these compact, high-efficiency sources offering new prospects for applications of these devices in future large-scale quantum networks.
title Bright quantum dot light sources using monolithic microlenses on gold back-reflectors
topic Mesoscale and Nanoscale Physics
url https://arxiv.org/abs/2503.07305