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Highly Uniform Thermally Undercut Silicon Photonic Devices in a 300 mm CMOS Foundry Process

Fuente: arXiv

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Bibliographic Details
Main Authors:	Parsons, Robert, Jang, Kaylx, Wang, Yuyang, Novick, Asher, Smith, A. Matthew, Tison, Christopher C., Gebregiorgis, Yonas, Deenadayalan, Venkatesh, van Niekerk, Matthew, Carpenter, Lewis, Ngai, Tat, Leake, Gerald, Coleman, Daniel, Meng, Xiang, Preble, Stefan, Fanto, Michael L., Bergman, Keren, Rizzo, Anthony
Format:	Preprint
Published:	2025
Subjects:	Optics Applied Physics
Online Access:	Acceder al recurso
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