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Main Authors: Huang, Yi-Hsiang, Wang, Haozhi, Shen, Zhuo, Thomas, Austin, Richardson, C. J. K., Palmer, B. S.
Format: Preprint
Published: 2025
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Online Access:https://arxiv.org/abs/2503.10909
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author Huang, Yi-Hsiang
Wang, Haozhi
Shen, Zhuo
Thomas, Austin
Richardson, C. J. K.
Palmer, B. S.
author_facet Huang, Yi-Hsiang
Wang, Haozhi
Shen, Zhuo
Thomas, Austin
Richardson, C. J. K.
Palmer, B. S.
contents Extraneous high frequency chip modes parasitic to superconducting quantum circuits can result in decoherence when these modes are excited. To suppress these modes, superconducting air bridges (AB) are commonly used to electrically connect ground planes together when interrupted by transmission lines. Here, we demonstrate the use of two-photon photolithography to build a supporting 3D resist structure in conjunction with a lift-off process to create AB. The resulting aluminum AB, have a superconducting transition temperature $T_{c} = 1.08$ K and exhibit good mechanical strength up to lengths of 100 $μ$m. A measurable amount of microwave loss is observed when 35 AB were placed over a high-$Q$ Ta quarter-wave coplanar waveguide resonator.
format Preprint
id arxiv_https___arxiv_org_abs_2503_10909
institution arXiv
publishDate 2025
record_format arxiv
spellingShingle Fabrication of Metal Air Bridges for Superconducting Circuits using Two-photon Lithography
Huang, Yi-Hsiang
Wang, Haozhi
Shen, Zhuo
Thomas, Austin
Richardson, C. J. K.
Palmer, B. S.
Quantum Physics
Superconductivity
Extraneous high frequency chip modes parasitic to superconducting quantum circuits can result in decoherence when these modes are excited. To suppress these modes, superconducting air bridges (AB) are commonly used to electrically connect ground planes together when interrupted by transmission lines. Here, we demonstrate the use of two-photon photolithography to build a supporting 3D resist structure in conjunction with a lift-off process to create AB. The resulting aluminum AB, have a superconducting transition temperature $T_{c} = 1.08$ K and exhibit good mechanical strength up to lengths of 100 $μ$m. A measurable amount of microwave loss is observed when 35 AB were placed over a high-$Q$ Ta quarter-wave coplanar waveguide resonator.
title Fabrication of Metal Air Bridges for Superconducting Circuits using Two-photon Lithography
topic Quantum Physics
Superconductivity
url https://arxiv.org/abs/2503.10909