Compensating Hysteresis and Mechanical Misalignment in Piezo-Stepper Actuators
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arXiv
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| Main Authors: | van Meer, Max, van Meijel, Tim, van Halsema, Emile, Verschueren, Edwin, Witvoet, Gert, Oomen, Tom |
|---|---|
| Format: | Preprint |
| Published: |
2025
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| Subjects: | |
| Online Access: | |
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