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Main Authors: Artusio-Glimpse, Alexandra B., Meraki, Adil, Shillingburg, Hunter, Lavallee, Guy, Liu, Miao, Eichfeld, Chad, Simons, Matthew T., Holland, Glenn, Holloway, Christopher L., Aksyuk, Vladimir A., Lopez, Daniel
Format: Preprint
Published: 2025
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Online Access:https://arxiv.org/abs/2503.15433
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author Artusio-Glimpse, Alexandra B.
Meraki, Adil
Shillingburg, Hunter
Lavallee, Guy
Liu, Miao
Eichfeld, Chad
Simons, Matthew T.
Holland, Glenn
Holloway, Christopher L.
Aksyuk, Vladimir A.
Lopez, Daniel
author_facet Artusio-Glimpse, Alexandra B.
Meraki, Adil
Shillingburg, Hunter
Lavallee, Guy
Liu, Miao
Eichfeld, Chad
Simons, Matthew T.
Holland, Glenn
Holloway, Christopher L.
Aksyuk, Vladimir A.
Lopez, Daniel
contents Rydberg-atom electrometry enables highly sensitive electric-field measurements by exploiting the extreme polarizability of Rydberg states in alkali atoms. Millimeter-scale atomic vapor cells can be accurately and economically batch-fabricated by anodically bonding silicon and glass wafers, enabling the large-volume manufacturing of miniature atomic clocks and quantum sensors. However, silicon is not always an ideal constitutive material for electric-field sensing because of its high dielectric constant and conductive losses at millimeter wave frequencies. A broader selection of low-loss all-dielectric alternatives may be beneficial for specific applications. Here, we present an all-glass wafer-level microfabrication process that eliminates silicon, creating hermetically sealed vapor cells that are stable over long timelines with embedded cesium dispensers. Femtosecond laser machining precisely defines the cell geometry, and laser-activated alkali loading ensures reliable filling. We demonstrate long-term vacuum stability and robust Rydberg excitation through electromagnetically induced transparency measurements of several Rydberg states. We then use these cells to measure a 34 GHz millimeter wave field resonant with the 58D$_{5/2}\rightarrow$60P$_{3/2}$ transition using Autler-Townes splitting showing expected linear dependence with field strength. This work demonstrates that the all-glass approach offers a highly durable low-loss cell alternative for miniaturized millimeter wave and microwave quantum sensing, with the potential to flexibly incorporate a range of other dielectric and semiconductor materials and integrated photonic and electronic technologies.
format Preprint
id arxiv_https___arxiv_org_abs_2503_15433
institution arXiv
publishDate 2025
record_format arxiv
spellingShingle Wafer-level fabrication of all-dielectric vapor cells enabling optically addressed Rydberg atom electrometry
Artusio-Glimpse, Alexandra B.
Meraki, Adil
Shillingburg, Hunter
Lavallee, Guy
Liu, Miao
Eichfeld, Chad
Simons, Matthew T.
Holland, Glenn
Holloway, Christopher L.
Aksyuk, Vladimir A.
Lopez, Daniel
Atomic Physics
Rydberg-atom electrometry enables highly sensitive electric-field measurements by exploiting the extreme polarizability of Rydberg states in alkali atoms. Millimeter-scale atomic vapor cells can be accurately and economically batch-fabricated by anodically bonding silicon and glass wafers, enabling the large-volume manufacturing of miniature atomic clocks and quantum sensors. However, silicon is not always an ideal constitutive material for electric-field sensing because of its high dielectric constant and conductive losses at millimeter wave frequencies. A broader selection of low-loss all-dielectric alternatives may be beneficial for specific applications. Here, we present an all-glass wafer-level microfabrication process that eliminates silicon, creating hermetically sealed vapor cells that are stable over long timelines with embedded cesium dispensers. Femtosecond laser machining precisely defines the cell geometry, and laser-activated alkali loading ensures reliable filling. We demonstrate long-term vacuum stability and robust Rydberg excitation through electromagnetically induced transparency measurements of several Rydberg states. We then use these cells to measure a 34 GHz millimeter wave field resonant with the 58D$_{5/2}\rightarrow$60P$_{3/2}$ transition using Autler-Townes splitting showing expected linear dependence with field strength. This work demonstrates that the all-glass approach offers a highly durable low-loss cell alternative for miniaturized millimeter wave and microwave quantum sensing, with the potential to flexibly incorporate a range of other dielectric and semiconductor materials and integrated photonic and electronic technologies.
title Wafer-level fabrication of all-dielectric vapor cells enabling optically addressed Rydberg atom electrometry
topic Atomic Physics
url https://arxiv.org/abs/2503.15433