Development of High-Quality $α$-Ta Film at Room Temperature via Seed Layer Engineering
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arXiv
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| Main Authors: | Karuppannan, Senthil Kumar, Kommanaboina, Naga Manikanta, Kim, Hui Hui, Beng, Nelson Lim Chee, Sherry, Yap Lee Koon, Guangxu, Yan, Mukherjee, Manas |
|---|---|
| Format: | Preprint |
| Published: |
2025
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| Subjects: | |
| Online Access: | |
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