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A three-axis Nanopositioner based on Near-Field Acoustic Levitation and Electromagnetic Actuation

Fuente: arXiv

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Bibliographic Details
Main Authors:	Vikrant, K. S., Biswas, Prosanto, Moheimani, S. O. Reza
Format:	Preprint
Published:	2025
Subjects:	Applied Physics Systems and Control
Online Access:	Acceder al recurso
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