3D Heterogeneous Integration of Silicon Nitride and Aluminum Nitride on Sapphire toward Ultra-wideband Photonics Integrated Circuits

Fuente: arXiv

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Bibliographic Details
Main Authors:	Zhang, Liang, Guo, Yanan, Wang, Junxi, Li, Jinmin, Yan, Jianchang
Format:	Preprint
Published:	2025
Subjects:	Optics Applied Physics
Online Access:	Acceder al recurso
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Internet

https://arxiv.org/abs/2503.22544