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3D Heterogeneous Integration of Silicon Nitride and Aluminum Nitride on Sapphire toward Ultra-wideband Photonics Integrated Circuits

Fuente: arXiv

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Detalles Bibliográficos
Autores principales:	Zhang, Liang, Guo, Yanan, Wang, Junxi, Li, Jinmin, Yan, Jianchang
Formato:	Preprint
Publicado:	2025
Materias:	Optics Applied Physics
Acceso en línea:	Acceder al recurso
Etiquetas:	Agregar Etiqueta Sin Etiquetas, Sea el primero en etiquetar este registro!

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