Strain Effects in a Directly Bonded Diamond-on-Insulator Substrate

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Hauptverfasser: Varveris, Ioannis, Aliberti, Gianni D., Chen, Tianyin, Sfetcu, Filip A., Dekker, Diederik J. W., Schuurmans, Alfred, Nitzsche, Nikolaj K., Nur, Salahuddin, Ishihara, Ryoichi
Format: Preprint
Veröffentlicht: 2025
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author Varveris, Ioannis
Aliberti, Gianni D.
Chen, Tianyin
Sfetcu, Filip A.
Dekker, Diederik J. W.
Schuurmans, Alfred
Nitzsche, Nikolaj K.
Nur, Salahuddin
Ishihara, Ryoichi
author_facet Varveris, Ioannis
Aliberti, Gianni D.
Chen, Tianyin
Sfetcu, Filip A.
Dekker, Diederik J. W.
Schuurmans, Alfred
Nitzsche, Nikolaj K.
Nur, Salahuddin
Ishihara, Ryoichi
contents The direct bonding process of a diamond-on-insulator (DOI) substrate enables monolithic integration of diamond photonic structures for quantum computing by improving photon collection efficiency and entanglement generation rate between emitters. It also addresses key fabrication challenges, such as robustness, bonding strength, and scalability. This study investigates strain effects in DOI substrates following direct bonding. Strain generation is expected near the diamond-SiO$_2$/Si interface due to thermal expansion coefficient mismatch between the bonded materials. Strain-induced lattice distortions are characterized using nitrogen-vacancy (NV) centers in diamond via optically detected magnetic resonance (ODMR) and photoluminescence (PL) mapping. PL mapping reveals interference fringes in unbonded regions, indicating bonding irregularities. Depth-resolved ODMR measurements show a volumetric strain component increase of $\approx$0.45 MHz and a shear component increase of $\approx$0.71 MHz between the top surface and the DOI interface. However, ODMR signal contrast and peak linewidth remain largely unaffected, suggesting no visible deterioration in the optical properties of the emitters. By combining ODMR and PL mapping, this work establishes a robust methodology for assessing bonding quality and strain impact on NV centers, an essential step toward advancing scalable quantum technologies and integrated photonic circuits.
format Preprint
id arxiv_https___arxiv_org_abs_2503_24042
institution arXiv
publishDate 2025
record_format arxiv
spellingShingle Strain Effects in a Directly Bonded Diamond-on-Insulator Substrate
Varveris, Ioannis
Aliberti, Gianni D.
Chen, Tianyin
Sfetcu, Filip A.
Dekker, Diederik J. W.
Schuurmans, Alfred
Nitzsche, Nikolaj K.
Nur, Salahuddin
Ishihara, Ryoichi
Applied Physics
Materials Science
Quantum Physics
The direct bonding process of a diamond-on-insulator (DOI) substrate enables monolithic integration of diamond photonic structures for quantum computing by improving photon collection efficiency and entanglement generation rate between emitters. It also addresses key fabrication challenges, such as robustness, bonding strength, and scalability. This study investigates strain effects in DOI substrates following direct bonding. Strain generation is expected near the diamond-SiO$_2$/Si interface due to thermal expansion coefficient mismatch between the bonded materials. Strain-induced lattice distortions are characterized using nitrogen-vacancy (NV) centers in diamond via optically detected magnetic resonance (ODMR) and photoluminescence (PL) mapping. PL mapping reveals interference fringes in unbonded regions, indicating bonding irregularities. Depth-resolved ODMR measurements show a volumetric strain component increase of $\approx$0.45 MHz and a shear component increase of $\approx$0.71 MHz between the top surface and the DOI interface. However, ODMR signal contrast and peak linewidth remain largely unaffected, suggesting no visible deterioration in the optical properties of the emitters. By combining ODMR and PL mapping, this work establishes a robust methodology for assessing bonding quality and strain impact on NV centers, an essential step toward advancing scalable quantum technologies and integrated photonic circuits.
title Strain Effects in a Directly Bonded Diamond-on-Insulator Substrate
topic Applied Physics
Materials Science
Quantum Physics
url https://arxiv.org/abs/2503.24042