Low-voltage Ferroelectric Field-Effect Transistors with Ultrathin Aluminum Scandium Nitride and 2D channels

Fuente: arXiv
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Autores principales: Leblanc, Chloe, Cho, Hyunmin, Zhang, Yinuo, Song, Seunguk, Anderson, Zachary, He, Yunfei, Chen, Chen, Redwing, Joan, Olsson III, Roy H., Jariwala, Deep
Formato: Preprint
Publicado: 2025
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author Leblanc, Chloe
Cho, Hyunmin
Zhang, Yinuo
Song, Seunguk
Anderson, Zachary
He, Yunfei
Chen, Chen
Redwing, Joan
Olsson III, Roy H.
Jariwala, Deep
author_facet Leblanc, Chloe
Cho, Hyunmin
Zhang, Yinuo
Song, Seunguk
Anderson, Zachary
He, Yunfei
Chen, Chen
Redwing, Joan
Olsson III, Roy H.
Jariwala, Deep
contents The continued evolution of CMOS technology demands materials and architectures that emphasize low power consumption, particularly for computations involving large scale data processing and multivariable optimization. Ferroelectric materials offer promising solutions through enabling dual-purpose memory units capable of performing both storage and logic operations. In this study, we demonstrate ferroelectric field effect transistors (FeFETs) with MoS2 monolayer channels fabricated on ultrathin 5 nm and 10 nm ferroelectric Aluminum Scandium Nitride (AlScN) films. By decreasing the thickness of the ferroelectric film, we achieve significantly reduced gate voltages (<3V) required to switch the conductance of the devices, enabling operation at low voltages compatible with advanced CMOS. We observe a characteristic crossover in hysteresis behavior that varies with film thickness, channel fabrication method, and environmental conditions. Through systematic investigation of multiple parameters including channel fabrication methods, dimensional scaling, and environmental effects, we provide pathways to improve device performance. While our devices demonstrate clear ferroelectric switching behavior, further optimization is required to enhance the ON/OFF ratio at zero gate voltage while continuing to reduce the coercive field of these ultrathin films.
format Preprint
id arxiv_https___arxiv_org_abs_2504_07271
institution arXiv
publishDate 2025
record_format arxiv
spellingShingle Low-voltage Ferroelectric Field-Effect Transistors with Ultrathin Aluminum Scandium Nitride and 2D channels
Leblanc, Chloe
Cho, Hyunmin
Zhang, Yinuo
Song, Seunguk
Anderson, Zachary
He, Yunfei
Chen, Chen
Redwing, Joan
Olsson III, Roy H.
Jariwala, Deep
Applied Physics
Mesoscale and Nanoscale Physics
Materials Science
The continued evolution of CMOS technology demands materials and architectures that emphasize low power consumption, particularly for computations involving large scale data processing and multivariable optimization. Ferroelectric materials offer promising solutions through enabling dual-purpose memory units capable of performing both storage and logic operations. In this study, we demonstrate ferroelectric field effect transistors (FeFETs) with MoS2 monolayer channels fabricated on ultrathin 5 nm and 10 nm ferroelectric Aluminum Scandium Nitride (AlScN) films. By decreasing the thickness of the ferroelectric film, we achieve significantly reduced gate voltages (<3V) required to switch the conductance of the devices, enabling operation at low voltages compatible with advanced CMOS. We observe a characteristic crossover in hysteresis behavior that varies with film thickness, channel fabrication method, and environmental conditions. Through systematic investigation of multiple parameters including channel fabrication methods, dimensional scaling, and environmental effects, we provide pathways to improve device performance. While our devices demonstrate clear ferroelectric switching behavior, further optimization is required to enhance the ON/OFF ratio at zero gate voltage while continuing to reduce the coercive field of these ultrathin films.
title Low-voltage Ferroelectric Field-Effect Transistors with Ultrathin Aluminum Scandium Nitride and 2D channels
topic Applied Physics
Mesoscale and Nanoscale Physics
Materials Science
url https://arxiv.org/abs/2504.07271