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CMOS-compatible vanadium dioxide via Pulsed Laser and Atomic Layer deposition: towards ultra-thin film phase-change layers

Fuente: arXiv
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Bibliographic Details
Main Authors: Varini, Anna, Masserey, Cyrille, Conti, Vanessa, Somaehsofla, Zahra Saadat, Ansari, Ehsan, Stolichnov, Igor, Ionescu, Adrian M.
Format: Preprint
Published: 2025
Subjects:
Materials Science
Applied Physics
Online Access:
Acceder al recurso
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