Coherent EUV scatterometry of 2D periodic structure profiles with mathematically optimal experimental design

Fuente: arXiv

Saved in:

Bibliographic Details
Main Authors:	Klein, Clay, Jenkins, Nicholas W., Shao, Yunzhe, Li, Yunhao, Park, Seungbeom, Kim, Wookrae, Kapteyn, Henry C., Murnane, Margaret M.
Format:	Preprint
Published:	2025
Subjects:	Optics
Online Access:	Acceder al recurso
Tags:	Add Tag No Tags, Be the first to tag this record!

Internet

https://arxiv.org/abs/2504.12133