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Coherent EUV scatterometry of 2D periodic structure profiles with mathematically optimal experimental design

Fuente: arXiv

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Bibliographic Details
Main Authors:	Klein, Clay, Jenkins, Nicholas W., Shao, Yunzhe, Li, Yunhao, Park, Seungbeom, Kim, Wookrae, Kapteyn, Henry C., Murnane, Margaret M.
Format:	Preprint
Published:	2025
Subjects:	Optics
Online Access:	Acceder al recurso
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