Scalable High-Precision Microfabrication on Various Lithography-Incompatible Substrates and Materials Enabled by Wafer-Scale Transfer Lithography of Commercial Photoresists

Fuente: arXiv

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Bibliographic Details
Main Authors:	Guo, Qinhua, Xu, Zhiqing, Yang, Lizhou, Zhang, Jingyang, Gan, Yawen, Zhang, Jiajun, Jiang, Jiahao, Wang, Yunda
Format:	Preprint
Published:	2025
Subjects:	Applied Physics
Online Access:	Acceder al recurso
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Internet

https://arxiv.org/abs/2504.15078