Positive-tone Nanolithography of Antimony Trisulfide with Femtosecond Laser Wet-etching

Fuente: arXiv

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Bibliographic Details
Main Authors:	Dey, Abhrodeep, Hübner, Uwe, Benardais, Albane, Wu, Xiaofei, Dellith, Andrea, Dellith, Jan, Wieduwilt, Torsten, Schneidewind, Henrik, Schmidt, Markus A, Nazabal, Virginie, Deckert, Volker, Huang, Jer-Shing, Wang, Wei
Format:	Preprint
Published:	2025
Subjects:	Optics Materials Science Instrumentation and Detectors
Online Access:	Acceder al recurso
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Internet

https://arxiv.org/abs/2504.15858