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Autori principali: Rajan, Vishwa Krishna, Chao, Jeremy, Taylor, Sydney, Wang, Liping
Natura: Preprint
Pubblicazione: 2025
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Accesso online:https://arxiv.org/abs/2504.17976
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author Rajan, Vishwa Krishna
Chao, Jeremy
Taylor, Sydney
Wang, Liping
author_facet Rajan, Vishwa Krishna
Chao, Jeremy
Taylor, Sydney
Wang, Liping
contents Thermochromic vanadium dioxide thin films have attracted much attention recently for constructing variable-emittance coatings upon its insulator-metal phase transition for dynamic thermal control. However, fabrication of high-quality vanadium dioxide thin films in a cost-effective way is still a challenge. In addition, the phase transition temperature of vanadium dioxide is around 68°C, which is higher than most of terrestrial and extraterrestrial applications. In this study, we report the fabrication and characterization of tungsten-doped vanadium dioxide thin films with lowered phase transition temperatures via co-sputtering, furnace oxidation and thermal annealing processes for wider application needs. The doping is achieved by co-sputtering of tungsten and vanadium targets while the doping level is varied by carefully controlling the sputtering power for tungsten. Doped thin film samples of 30-nm thick with different tungsten atomic concentrations are prepared by co-sputtering onto undoped silicon wafers. Optimal oxidation time of 4 hours is determined to reach full oxidation in an oxygen-rich furnace environment at 300°C. Systematic thermal annealing study is carried out to find the optimal annealing temperature and time. By using an optical cryostat coupled to an infrared spectrometer, the temperature-dependent infrared transmittance of fully annealed tungsten-doped vanadium dioxide thin films are measured in a wide temperature range from -60°C to 100°C. The phase transition temperature is found to decrease at 24.5°C per at.% of tungsten doping, and the thermal hysteresis between heating and cooling shrinks at 5.5°C per at.% from the fabricated vanadium dioxide thin films with tungsten doping up to 4.1 at.%.
format Preprint
id arxiv_https___arxiv_org_abs_2504_17976
institution arXiv
publishDate 2025
record_format arxiv
spellingShingle Lowering Insulator-to-Metal Transition Temperature of Vanadium Dioxide Thin Films via Co-Sputtering, Furnace Oxidation and Thermal Annealing
Rajan, Vishwa Krishna
Chao, Jeremy
Taylor, Sydney
Wang, Liping
Materials Science
Optics
Thermochromic vanadium dioxide thin films have attracted much attention recently for constructing variable-emittance coatings upon its insulator-metal phase transition for dynamic thermal control. However, fabrication of high-quality vanadium dioxide thin films in a cost-effective way is still a challenge. In addition, the phase transition temperature of vanadium dioxide is around 68°C, which is higher than most of terrestrial and extraterrestrial applications. In this study, we report the fabrication and characterization of tungsten-doped vanadium dioxide thin films with lowered phase transition temperatures via co-sputtering, furnace oxidation and thermal annealing processes for wider application needs. The doping is achieved by co-sputtering of tungsten and vanadium targets while the doping level is varied by carefully controlling the sputtering power for tungsten. Doped thin film samples of 30-nm thick with different tungsten atomic concentrations are prepared by co-sputtering onto undoped silicon wafers. Optimal oxidation time of 4 hours is determined to reach full oxidation in an oxygen-rich furnace environment at 300°C. Systematic thermal annealing study is carried out to find the optimal annealing temperature and time. By using an optical cryostat coupled to an infrared spectrometer, the temperature-dependent infrared transmittance of fully annealed tungsten-doped vanadium dioxide thin films are measured in a wide temperature range from -60°C to 100°C. The phase transition temperature is found to decrease at 24.5°C per at.% of tungsten doping, and the thermal hysteresis between heating and cooling shrinks at 5.5°C per at.% from the fabricated vanadium dioxide thin films with tungsten doping up to 4.1 at.%.
title Lowering Insulator-to-Metal Transition Temperature of Vanadium Dioxide Thin Films via Co-Sputtering, Furnace Oxidation and Thermal Annealing
topic Materials Science
Optics
url https://arxiv.org/abs/2504.17976