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| Main Authors: | , , , , , , |
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| Format: | Preprint |
| Published: |
2025
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| Subjects: | |
| Online Access: | https://arxiv.org/abs/2504.19936 |
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| _version_ | 1866908501591195648 |
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| author | Hsu, Tzu-Hsuan Saha, Kapil Kramer, Jack Barrera, Omar Simoni, Pietro Rinaldi, Matteo Lu, Ruochen |
| author_facet | Hsu, Tzu-Hsuan Saha, Kapil Kramer, Jack Barrera, Omar Simoni, Pietro Rinaldi, Matteo Lu, Ruochen |
| contents | In this work, an Aluminum Scandium Nitride (AlScN) on Diamond Sezawa-mode surface acoustic wave (SAW) platform for RF filtering at Ku-band (12-18 GHz) is demonstrated. Thanks to the high acoustic velocity and low-loss diamond substrate, the prototype resonator at 12.9 GHz achieves a high phase velocity ($v_p$) of 8671 m/s, a maximum Bode-$Q$ of 408, and coupling coefficient ($k_{\mathrm{eff}}^2$) of 2.1%, outperforming high-velocity substrates such as SiC and sapphire by more than 20% in velocity. Resonators spanning 8-18 GHz are presented. The platform's high power handling above 12.5 dBm is also experimentally validated. |
| format | Preprint |
| id |
arxiv_https___arxiv_org_abs_2504_19936 |
| institution | arXiv |
| publishDate | 2025 |
| record_format | arxiv |
| spellingShingle | Ku-Band AlScn-On-Diamond SAW Resonators with Phase Velocity above 8600 m/s Hsu, Tzu-Hsuan Saha, Kapil Kramer, Jack Barrera, Omar Simoni, Pietro Rinaldi, Matteo Lu, Ruochen Signal Processing In this work, an Aluminum Scandium Nitride (AlScN) on Diamond Sezawa-mode surface acoustic wave (SAW) platform for RF filtering at Ku-band (12-18 GHz) is demonstrated. Thanks to the high acoustic velocity and low-loss diamond substrate, the prototype resonator at 12.9 GHz achieves a high phase velocity ($v_p$) of 8671 m/s, a maximum Bode-$Q$ of 408, and coupling coefficient ($k_{\mathrm{eff}}^2$) of 2.1%, outperforming high-velocity substrates such as SiC and sapphire by more than 20% in velocity. Resonators spanning 8-18 GHz are presented. The platform's high power handling above 12.5 dBm is also experimentally validated. |
| title | Ku-Band AlScn-On-Diamond SAW Resonators with Phase Velocity above 8600 m/s |
| topic | Signal Processing |
| url | https://arxiv.org/abs/2504.19936 |