Thin-film scandium aluminum nitride bulk acoustic resonator with high Q of 208 and K2 of 9.5% at 12.5 GHz
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| Main Authors: | , , , , , , , , , , , |
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| Format: | Preprint |
| Published: |
2025
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| _version_ | 1866913813492662272 |
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| author | Cho, Sinwoo Wang, Yinan Kwon, Eugene Matto, Lezli Barrera, Omar Liao, Michael Kramer, Jack Hsu, Tzu-Hsuan Chulukhadze, Vakhtang Anderson, Ian Goorksy, Mark Lu, Ruochen |
| author_facet | Cho, Sinwoo Wang, Yinan Kwon, Eugene Matto, Lezli Barrera, Omar Liao, Michael Kramer, Jack Hsu, Tzu-Hsuan Chulukhadze, Vakhtang Anderson, Ian Goorksy, Mark Lu, Ruochen |
| contents | This work describes sputtered scandium aluminum nitride (ScAlN) thin-film bulk acoustic resonators (FBAR) at 12.5 GHz with high electromechanical coupling (k2) of 9.5% and quality factor (Q) of 208, resulting in a figure of merit (FoM, Qk2) of 19.8. ScAlN resonators employ a stack of 90 nm thick 20% Sc doping ScAlN piezoelectric film on the floating bottom 38 nm thick platinum (Pt) electrode to achieve low losses and high coupling toward centimeter wave (cmWave) frequency band operation. Three fabricated and FBARs are reported, show promising prospects of ScAlN-Pt stack towards cmWave front-end filters. |
| format | Preprint |
| id |
arxiv_https___arxiv_org_abs_2504_20014 |
| institution | arXiv |
| publishDate | 2025 |
| record_format | arxiv |
| spellingShingle | Thin-film scandium aluminum nitride bulk acoustic resonator with high Q of 208 and K2 of 9.5% at 12.5 GHz Cho, Sinwoo Wang, Yinan Kwon, Eugene Matto, Lezli Barrera, Omar Liao, Michael Kramer, Jack Hsu, Tzu-Hsuan Chulukhadze, Vakhtang Anderson, Ian Goorksy, Mark Lu, Ruochen Applied Physics This work describes sputtered scandium aluminum nitride (ScAlN) thin-film bulk acoustic resonators (FBAR) at 12.5 GHz with high electromechanical coupling (k2) of 9.5% and quality factor (Q) of 208, resulting in a figure of merit (FoM, Qk2) of 19.8. ScAlN resonators employ a stack of 90 nm thick 20% Sc doping ScAlN piezoelectric film on the floating bottom 38 nm thick platinum (Pt) electrode to achieve low losses and high coupling toward centimeter wave (cmWave) frequency band operation. Three fabricated and FBARs are reported, show promising prospects of ScAlN-Pt stack towards cmWave front-end filters. |
| title | Thin-film scandium aluminum nitride bulk acoustic resonator with high Q of 208 and K2 of 9.5% at 12.5 GHz |
| topic | Applied Physics |
| url | https://arxiv.org/abs/2504.20014 |