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Thin-film scandium aluminum nitride bulk acoustic resonator with high Q of 208 and K2 of 9.5% at 12.5 GHz

Fuente: arXiv

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Bibliographic Details
Main Authors:	Cho, Sinwoo, Wang, Yinan, Kwon, Eugene, Matto, Lezli, Barrera, Omar, Liao, Michael, Kramer, Jack, Hsu, Tzu-Hsuan, Chulukhadze, Vakhtang, Anderson, Ian, Goorksy, Mark, Lu, Ruochen
Format:	Preprint
Published:	2025
Subjects:	Applied Physics
Online Access:	Acceder al recurso
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