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Leakage Suppression Across Temperature in Al1-xScxN Thin Film Ferroelectric Capacitors through Boron Incorporation

Fuente: arXiv

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Bibliographic Details
Main Authors:	Yousefian, Pedram, Tong, Xiaolei, Tan, Jonathan, Pradhan, Dhiren K., Jariwala, Deep, Olsson III, Roy H.
Format:	Preprint
Published:	2025
Subjects:	Materials Science Applied Physics
Online Access:	Acceder al recurso
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