Comparing the performance of direct and parametric drives for piezoelectric MEMS actuators

Fuente: arXiv
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Autores principales: Houri, Samer, Rochus, Veronique
Formato: Preprint
Publicado: 2025
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_version_ 1866909601102823424
author Houri, Samer
Rochus, Veronique
author_facet Houri, Samer
Rochus, Veronique
contents This work investigates and compares the response of piezoelectrically actuated nonlinear microelectromechanical devices (MEMS) to direct and to degenerate parametric drives. We describe the regime of degenerate parametric amplification in piezoelectric Duffing-type nonlinear MEMS devices using a single mode expansion, we then explore the existence of regions in parameter space where parametric excitation maybe advantageous compared to direct drive, which we label "parametric advantage". Analytical, experimental, and numerical verification demonstrates that parametric advantage can not exist if both pump and signal voltages are accounted for in the total voltage budget. This work determines non-dimensional scaling rules that can act as guidelines for selecting an optimal operating regime for degenerate parametric amplification.
format Preprint
id arxiv_https___arxiv_org_abs_2505_02237
institution arXiv
publishDate 2025
record_format arxiv
spellingShingle Comparing the performance of direct and parametric drives for piezoelectric MEMS actuators
Houri, Samer
Rochus, Veronique
Mesoscale and Nanoscale Physics
Applied Physics
This work investigates and compares the response of piezoelectrically actuated nonlinear microelectromechanical devices (MEMS) to direct and to degenerate parametric drives. We describe the regime of degenerate parametric amplification in piezoelectric Duffing-type nonlinear MEMS devices using a single mode expansion, we then explore the existence of regions in parameter space where parametric excitation maybe advantageous compared to direct drive, which we label "parametric advantage". Analytical, experimental, and numerical verification demonstrates that parametric advantage can not exist if both pump and signal voltages are accounted for in the total voltage budget. This work determines non-dimensional scaling rules that can act as guidelines for selecting an optimal operating regime for degenerate parametric amplification.
title Comparing the performance of direct and parametric drives for piezoelectric MEMS actuators
topic Mesoscale and Nanoscale Physics
Applied Physics
url https://arxiv.org/abs/2505.02237